MEMS/NEMS handbook : techniques and applications /
Contributor(s): Leondes, Cornelius T
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Publisher: New York : Springer, 2006Description: 5 v. : ill. ; 25 cm.Content type: text Media type: unmediated Carrier type: volumeISBN: 0387245200.Subject(s): Microelectromechanical systems -- Design and construction | NanotechnologyDDC classification: 621.381 | Item type | Current library | Call number | Copy number | Status | Date due | Barcode | Item holds |
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Library Use Only
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ATU Sligo Yeats Library Reference Collection | 621.381 LEO (Browse shelf(Opens below)) | 1 | Not for loan | 0057474 | ||
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Library Use Only
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ATU Sligo Yeats Library Reference Collection | 621.381 LEO (Browse shelf(Opens below)) | 2 | Not for loan | 0057475 | ||
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Library Use Only
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ATU Sligo Yeats Library Reference Collection | 621.381 LEO (Browse shelf(Opens below)) | 3 | Not for loan | 0057476 | ||
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Library Use Only
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ATU Sligo Yeats Library Reference Collection | 621.381 LEO (Browse shelf(Opens below)) | 4 | Not for loan | 0057477 | ||
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Library Use Only
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ATU Sligo Yeats Library Reference Collection | 621.381 LEO (Browse shelf(Opens below)) | 5 | Not for loan | 0057478 |
Includes bibliographical references and index.
v. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMS.
Covers all major topics within this increasingly important subject, including design methods, fabrication techniques, manufacturing methods, sensors & actuators.