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MEMS/MOEMS packaging : concepts, designs, materials, and processes /
By: Gilleo, Ken, Ph. D.
Series: McGraw-Hill nanoscience and technology series.Publisher: New York : McGraw-Hill, 2005Description: xiii, 220 p. : ill. ; 24 cm.Content type: text Media type: unmediated Carrier type: volumeISBN: 0071455566; 9780071455565:.Subject(s): Microelectronic packaging
| Microelectromechanical systems | Optoelectronic devices | PackagingDDC classification: 621.381046 Summary: Because of the sensitive nature of the MEMS devices, their packaging presents several problems not standard to the electronics industry. This text aims to explore solutions to critical problems in microelectronic and MOEMS assembly and packaging.
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
Standard Loan
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ATU Sligo Yeats Library Main Lending Collection | 621.381046 GIL (Browse shelf(Opens below)) | 1 | Available | 0053095 |
Total holds: 0
Includes bibliographical references (p. 203-213) and index.
Because of the sensitive nature of the MEMS devices, their packaging presents several problems not standard to the electronics industry. This text aims to explore solutions to critical problems in microelectronic and MOEMS assembly and packaging.