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Reliability, testing, and characterization of MEMS/MOEMS III /
Conference: SPIE conference 26-28 January, 2004 : San Jose, California, USA.
Contributor(s): Tanner, Danelle Mary
| Ramesham, Rajeshuni | Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ; v. 5343.Publisher: Bellingham, Wash. : SPIE, 2004Description: xxxi, 312 p. : ill. ; 28 cm.Content type: text Media type: unmediated Carrier type: volumeISBN: 0819452513; 9780819452511.Subject(s): Microelectromechanical systems -- Reliability -- Congresses | Microelectromechanical systems -- Testing -- Congresses
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
Library Use Only
|
ATU Sligo Yeats Library Official Publications | CONF (Browse shelf(Opens below)) | 1 | Not for loan | 0066265 |
Total holds: 0
Includes bibliographical references and author index.