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MEMS, MOEMS, and micromachining II /

Conference: SPIE conference 3-4 April, 2006 : Strasbourg, France.
Contributor(s): Urey, Hakan, 1970- | El-Fatatry, Ayman | SPIE Europe | Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE ; v. 6186.Publisher: Bellingham, Wa. : SPIE, 2006Description: 1 v. (various pagings) : ill. ; 28 cm.Content type: text Media type: unmediated Carrier type: volumeISBN: 081946242X; 9780819462428.Subject(s): Microelectromechanical systems -- Congresses | Optoelectronic devices -- Congresses | Micromachining -- Congresses
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Holdings
Item type Current library Call number Copy number Status Date due Barcode Item holds
Library Use Only Library Use Only ATU Sligo Yeats Library Official Publications CONF (Browse shelf(Opens below)) 1 Not for loan 0066255
Total holds: 0

Includes bibliographical references and author index.

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