MEMS, MOEMS, and micromachining II /
Conference: SPIE conference 3-4 April, 2006 : Strasbourg, France.
Contributor(s): Urey, Hakan
| El-Fatatry, Ayman
| SPIE Europe
| Society of Photo-optical Instrumentation Engineers
.
Series: Proceedings of SPIE ; v. 6186.Publisher: Bellingham, Wa. : SPIE, 2006Description: 1 v. (various pagings) : ill. ; 28 cm.Content type: text Media type: unmediated Carrier type: volumeISBN: 081946242X; 9780819462428.Subject(s): Microelectromechanical systems -- Congresses![](/opac-tmpl/bootstrap/images/filefind.png)
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Item type | Current library | Call number | Copy number | Status | Date due | Barcode | Item holds |
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ATU Sligo Yeats Library Official Publications | CONF (Browse shelf(Opens below)) | 1 | Not for loan | 0066255 |
Total holds: 0
Includes bibliographical references and author index.