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		Sensors for mechatronics / by Regtien, Paul P. L Series: Elsevier insights Publication details: Amsterdam ; New York : Elsevier, 2012 Availability: Items available for loan: ATU Sligo Yeats Library (1)Location, call number: Main Lending Collection 621.381 REG. Place hold Place recall
		Fast simulation of electro-thermal MEMS : efficient dynamic compact models / by Bechtold, Tamara Korvink, J G Rudnyi, E B Series: Microtechnology and MEMS Publication details: Berlin : Springer, 2007 Availability: Items available for loan: ATU Sligo Yeats Library (1)Location, call number: Main Lending Collection 621.3 BEC. Place hold Place recall
		MEMS/NEMS handbook : techniques and applications / by Leondes, Cornelius T Publication details: New York : Springer, 2006 Availability: Items available for reference: ATU Sligo Yeats Library: Not for loan (5)Location, call number: Reference Collection 621.381 LEO, ... Place recall
		MEMS 2006 Istanbul : [CD-ROM] : 19th IEEE International Conference on Micro Electro Mechanical Systems : Technical digest by IEEE International Conference on Micro Electro Mechanical Systems 19th : 22-26 January 2006 : Istanbul, Turkey IEEE Robotics and Automation Society Publication details: Piscataway, NJ : IEEE, 2006 Availability: Items available for loan: ATU Sligo Yeats Library (1)Location, call number: Electronic Media 621.381 IEE. Place recall
		MEMS : a practical guide to design, analysis, and applications / by Korvink, J. G. (Jan G.) Paul, Oliver Publication details: Norwich, NY : Heidelberg, Germany : W. Andrew Pub. ; Springer, 2006 Availability: Items available for reference: ATU Sligo Yeats Library: Not for loan (1)Location, call number: Reference Collection 621 KOR. Place recall
		MEMS, MOEMS, and micromachining II / by SPIE conference 3-4 April, 2006 : Strasbourg, France Urey, Hakan, 1970- El-Fatatry, Ayman SPIE Europe Society of Photo-optical Instrumentation Engineers Series: Proceedings of SPIE ; v. 6186 Publication details: Bellingham, Wa. : SPIE, 2006 Availability: Items available for reference: ATU Sligo Yeats Library: Not for loan (1)Location, call number: Official Publications CONF. Place recall
		Smart electronics, MEMS, BioMEMS, and nanotechnology / by Proceedings of SPIE 27 February - 1 March, 2006 : San Diego, California, USA Varadan, V. K, 1943- Society of Photo-optical Instrumentation Engineers American Society of Mechanical Engineers Intelligent Materials Forum (Mitō Kagaku Gijutsu Kyōkai) Series: Proceedings of SPIE ; v. 6172 Publication details: Bellingham, Wash. : SPIE, c2006 Availability: Items available for reference: ATU Sligo Yeats Library: Not for loan (1)Location, call number: Official Publications CONF. Place recall
		MEMS, introduction and fundamentals / by Gad-el-Hak, Mohamed, 1945- Series: The MEMS handbook \| Mechanical engineering series Edition: 2nd ed. Publication details: Boca Raton, FL : CRC/Taylor & Francis, 2006 Availability: Items available for loan: ATU Sligo Yeats Library (1)Location, call number: Main Lending Collection 621 GAD. Place hold Place recall
		Smart mems and sensor systems / by Gaura, Elena Newman, Robert Publication details: London : Imperial College Press, 2006 Availability: Items available for loan: ATU Sligo Yeats Library (1)Location, call number: Main Lending Collection 621.3 GAU. Place hold Place recall
		MEMS, design and fabrication / by Gad-el-Hak, Mohamed, 1945- Series: The MEMS handbook \| Mechanical engineering series Edition: 2nd ed. Publication details: Boca Raton, FL : CRC/Taylor & Francis, 2006 Availability: Items available for loan: ATU Sligo Yeats Library (1)Location, call number: Main Lending Collection 621 GAD. Place hold Place recall
		MEMS applications / by Gad-el-Hak, Mohamed, 1945- Series: The MEMS handbook \| Mechanical engineering series Edition: 2nd ed. Publication details: Boca Raton, FL : CRC/Taylor & Francis, 2006 Availability: Items available for loan: ATU Sligo Yeats Library (1)Location, call number: Main Lending Collection 621 GAD. Place hold Place recall
		MEMS/MOEMS packaging : concepts, designs, materials, and processes / by Gilleo, Ken, Ph. D Series: McGraw-Hill nanoscience and technology series Publication details: New York : McGraw-Hill, 2005 Availability: Items available for loan: ATU Sligo Yeats Library (1)Location, call number: Main Lending Collection 621.381046 GIL. Place hold Place recall
		Smart material systems and MEMS : design and development methodologies / by Varadan, V. K, 1943- Vinoy, K. J. (Kalarickaparambil Joseph), 1969- Gopalakrishnan, S Publication details: Chichester : John Wiley, 2006 Availability: Items available for loan: ATU Sligo Yeats Library (1)Location, call number: Main Lending Collection 621.381 VAR. Place hold Place recall
		MEMS mechanical sensors / by Beeby, Stephen Series: Microelectromechanical systems series Publication details: Boston : Artech House, 2004 Availability: Items available for loan: ATU Sligo Yeats Library (1)Location, call number: Main Lending Collection 621.381 BEE. Place hold Place recall
		Reliability, testing, and characterization of MEMS/MOEMS III / by SPIE conference 26-28 January, 2004 : San Jose, California, USA Tanner, Danelle Mary, 1952- Ramesham, Rajeshuni Society of Photo-optical Instrumentation Engineers Series: SPIE proceedings series ; v. 5343 Publication details: Bellingham, Wash. : SPIE, 2004 Availability: Items available for reference: ATU Sligo Yeats Library: Not for loan (1)Location, call number: Official Publications CONF. Place recall
		Micromechanics and nanoscale effects : MEMS, multi-scale materials and micro-flows / by Harik, Vasyl Michael Luo, Li-Shi Series: ICASE/LaRC interdisciplinary series in science and engineering ; 10 Publication details: Dordrecht ; London : Kluwer Academic, 2004 Availability: Items available for loan: ATU Sligo Yeats Library (1)Location, call number: Main Lending Collection 620.5 HAR. Place hold Place recall

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